| 摘要 |
PURPOSE: A diffusion tube for production of a solar battery is provided to remarkably reduce failure rate of substrates in which a diffusion process is finished by maintaining the inside of the diffusion tube with fixed pressure during the diffusion process. CONSTITUTION: A tube part(121a) has an internal space which is able to accept a substrate in order to execute a diffusion process. The tube part is formed into a longish tube type to front and back direction. A gas nozzle part(121b) has a plurality of gas blowers. The gas nozzle part sprays gas to the internal space of the tube part. A plurality of gas nozzle parts is located in the upper side of the substrate which is accepted in the internal space of the tube part. A gas pressure controlling part maintains the internal space of the tube part to fixed pressure. |
