| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a positive photosensitive resin composition developable with an aqueous alkaline solution, which has further improved sensitivity and resolution. <P>SOLUTION: A positive photosensitive resin composition contains (A) an alkali-soluble resin having a phenolic hydroxyl group, (B) a compound generating an acid with light, (C) an elastomer, (D) a low molecular weight compound having a phenolic hydroxyl group and (E) a solvent, where the (D) component is 2,2-bisä3,5-bis(hydroxymethyl)-4-hydroxyphenyl}-1,1,1,3,3,3-hexafluoropropane or 1,1-bisä3,5-bis(methoxymethyl)-4-hydroxyphenyl}methane. <P>COPYRIGHT: (C)2012,JPO&INPIT |
