THERMAL TREATMENT APPARATUS

摘要

PROBLEM TO BE SOLVED: To improve temperature uniformity of a substrate and improve efficiency in a thermal treatment apparatus performing thermal treatment on the substrate by using induction heating.

SOLUTION: A thermal treatment apparatus 1 performing thermal treatment on a plurality of substrates S comprises: a processing chamber 22 of a dielectric for housing the plurality of substrates on which the thermal treatment is performed; a substrate holding member 24 inserted and removed from inside the processing chamber 22 while holding the plurality of substrates S arranged one above the other; an induction heating coil 104 wound around an outer periphery of the processing chamber 22; a high-frequency power source 110 for applying a high-frequency power to the induction heating coil 104; and an induction heating bodies N each provided in such a manner as to overlap each of the plurality of substrates S in the processing chamber 22 and having a spiral part in which induction current generated by application of the high-frequency power to the induction heating coil 104 flows and heat is generated.

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