GAS SUPERHEATER AND SUPERHEATER CONNECTING BODY

摘要

[Problem] To provide a gas superheater and a gas superheater connecting body with which a corrosive and reactive gas, and particularly a raw material silicon tetrachloride gas in a zinc reduction method that manufactures high-purity silicon, can be strictly controlled and heated to a target temperature of 900-1,100°C. [Solution] A gas superheater characterized in that multiple heat-generating tubes housing heat-generating bodies are arranged in the lengthwise direction within an outer cylindrical tube equipped with a gas inflow port and a gas outflow port.