发明名称 PROCESS FOR PRODUCING SEMICONDUCTOR DEVICE
摘要 In a process for manufacturing a semiconductor device comprising heating a wiring board on which a chip and an uncured adhesive layer are laminated for curing the adhesive layer, the improvement includes performing a statically pressurizing step before the adhesive layer is cured, in which step the wiring board on which the chip and the uncured adhesive layer are laminated is subjected to a static pressure greater than atmospheric pressure by not less than 0.05 MPa. According to the invention, voids are easily eliminated irrespective of a design of the wiring board, and the adhesive is prevented from curling up on the chip.
申请公布号 EP2063465(A4) 申请公布日期 2012.08.08
申请号 EP20070792087 申请日期 2007.08.07
申请人 LINTEC CORPORATION 发明人 YAMAZAKI, OSAMU;ICHIKAWA, ISAO;SAIKI, NAOYA
分类号 H01L21/52;H01L21/00;H01L21/58;H01L21/60;H01L21/683 主分类号 H01L21/52
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