发明名称 |
PROCESS FOR PRODUCING SEMICONDUCTOR DEVICE |
摘要 |
In a process for manufacturing a semiconductor device comprising heating a wiring board on which a chip and an uncured adhesive layer are laminated for curing the adhesive layer, the improvement includes performing a statically pressurizing step before the adhesive layer is cured, in which step the wiring board on which the chip and the uncured adhesive layer are laminated is subjected to a static pressure greater than atmospheric pressure by not less than 0.05 MPa. According to the invention, voids are easily eliminated irrespective of a design of the wiring board, and the adhesive is prevented from curling up on the chip. |
申请公布号 |
EP2063465(A4) |
申请公布日期 |
2012.08.08 |
申请号 |
EP20070792087 |
申请日期 |
2007.08.07 |
申请人 |
LINTEC CORPORATION |
发明人 |
YAMAZAKI, OSAMU;ICHIKAWA, ISAO;SAIKI, NAOYA |
分类号 |
H01L21/52;H01L21/00;H01L21/58;H01L21/60;H01L21/683 |
主分类号 |
H01L21/52 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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