FLUORESCENT LAMP-TYPE SEMICONDUCTOR LED LIGHTING DEVICE FOR CLEAN ROOM FOR EXCLUSIVELY USED PHOTOLITHOGRAPHY PROCESS AND FLUORESCENT LAMP-TYPE LED LIGHTING DEVICE

摘要

PURPOSE: A fluorescent lamp type semiconductor LED lighting apparatus for a clean room exclusively used for a photolithography process and a fluorescent lamp type LED lighting apparatus are provided to have relatively long lifetime by using a semiconductor light emitting device as a light source. CONSTITUTION: A number of semiconductor light emitting devices(12) are installed on a substrate(10) in a row. A heat radiation frame(20) is installed on the substrate. A filter cover(30) is combined with the heat radiation frame to block specific wavelength components of light emitted from the semiconductor light emitting device. Two caps(40) are individually installed on both ends of the heat radiation frame and the filter cover.