发明名称 |
PLACE STATION FOR A PICK-AND-PLACE MACHINE |
摘要 |
<p>A place station for a pick-and-place machine, comprising:
a place stage assembly comprising a place stage for supporting a substrate;
a covering for providing a clean environment at the substrate, the covering comprising a first opening in a first face of the covering through which a placement operation may be performed to a limited area of the substrate;
wherein the place stage and the covering are mounted for relative movement to allow the opening to achieve a selected relative position over the substrate.</p> |
申请公布号 |
EP2483917(A1) |
申请公布日期 |
2012.08.08 |
申请号 |
EP20100763059 |
申请日期 |
2010.09.28 |
申请人 |
NEDERLANDSE ORGANISATIE VOOR TOEGEPAST -NATUURWETENSCHAPPELIJK ONDERZOEK TNO |
发明人 |
VAN DER DONCK, JACQUES COR JOHAN;DE JAGER, PIETER WILLEM HERMAN |
分类号 |
H01L21/68;H01L21/00;H05K13/04 |
主分类号 |
H01L21/68 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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