发明名称 PLACE STATION FOR A PICK-AND-PLACE MACHINE
摘要 <p>A place station for a pick-and-place machine, comprising: a place stage assembly comprising a place stage for supporting a substrate; a covering for providing a clean environment at the substrate, the covering comprising a first opening in a first face of the covering through which a placement operation may be performed to a limited area of the substrate; wherein the place stage and the covering are mounted for relative movement to allow the opening to achieve a selected relative position over the substrate.</p>
申请公布号 EP2483917(A1) 申请公布日期 2012.08.08
申请号 EP20100763059 申请日期 2010.09.28
申请人 NEDERLANDSE ORGANISATIE VOOR TOEGEPAST -NATUURWETENSCHAPPELIJK ONDERZOEK TNO 发明人 VAN DER DONCK, JACQUES COR JOHAN;DE JAGER, PIETER WILLEM HERMAN
分类号 H01L21/68;H01L21/00;H05K13/04 主分类号 H01L21/68
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