发明名称 |
METHOD FOR PRODUCTION OF WATER-REACTIVE Al FILM, AND STRUCTURAL MEMBER FOR FILM-FORMING CHAMBER |
摘要 |
<p>Provided herein are a method for the production of a water-reactive Al film which comprises the steps of melting a material which comprises 4NAl or 5NAl as an Al raw material and added In in an amount ranging from 2 to 5% by mass on the basis of the mass of the Al raw material in such a manner that the composition of the material becomes uniform; thermally spraying the resulting molten material on the surface of a base material according to the electric arc spraying technique, while using Ar gas as a spraying gas; and solidifying the sprayed molten material through quenching to thus form an Al film in which In is uniformly dispersed in Al crystalline grains; and a constituent member for a film-forming chamber, which is provided, on the surface, with this water-reactive Al film.</p> |
申请公布号 |
EP2280091(B1) |
申请公布日期 |
2012.08.08 |
申请号 |
EP20090738778 |
申请日期 |
2009.04.27 |
申请人 |
ULVAC, INC. |
发明人 |
KADOWAKI YUTAKA;SAITOU TOMOKO;LIM KENG WENG;MUSHIAKE KATSUHIKO |
分类号 |
C23C4/06;C22C21/00;C23C4/04;C23C4/08;C23C4/12;C23C14/00;C23C16/44 |
主分类号 |
C23C4/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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