SUBSTRATE TRANSPORT APPARUTUS HAVING FOUR SUBSTRATE SUPPORT

摘要

PURPOSE: A substrate transferring apparatus including four substrate supporting parts is provided to improve the processing speed by extending two hands in the same direction. CONSTITUTION: A linear guide module(30) is integrally formed with a body part. An upper hand(70) is located on the upside of the linear guide module. The upper hand includes two substrate supporting parts. A lower hand(50) includes a left member and a right member including the substrate supporting part. An arm part includes a left arm rotatably connected to the left member and a right arm rotatably connected to the right member.