发明名称 |
METHODS OF AND FACTORIES FOR THIN-FILM BATTERY MANUFACTURING |
摘要 |
Methods of and factories for thin-film battery manufacturing are described. A method includes operations for fabricating a thin-film battery. A factory includes one or more tool sets for fabricating a thin-film battery. |
申请公布号 |
KR20120088727(A) |
申请公布日期 |
2012.08.08 |
申请号 |
KR20127010405 |
申请日期 |
2010.09.20 |
申请人 |
APPLIED MATERIALS, INC. |
发明人 |
KWAK BYUNG SUNG;BANGERT STEFAN;HAAS DIETER;NALAMASU OMKARAM |
分类号 |
H01M10/0585;H01M10/04;H01M10/0525 |
主分类号 |
H01M10/0585 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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