发明名称 METHODS OF AND FACTORIES FOR THIN-FILM BATTERY MANUFACTURING
摘要 Methods of and factories for thin-film battery manufacturing are described. A method includes operations for fabricating a thin-film battery. A factory includes one or more tool sets for fabricating a thin-film battery.
申请公布号 KR20120088727(A) 申请公布日期 2012.08.08
申请号 KR20127010405 申请日期 2010.09.20
申请人 APPLIED MATERIALS, INC. 发明人 KWAK BYUNG SUNG;BANGERT STEFAN;HAAS DIETER;NALAMASU OMKARAM
分类号 H01M10/0585;H01M10/04;H01M10/0525 主分类号 H01M10/0585
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