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发明名称
摘要
申请公布号
JP4993730(B2)
申请公布日期
2012.08.08
申请号
JP20070250689
申请日期
2007.09.27
申请人
发明人
分类号
C23C14/02;C23F4/00;C23G5/028;H01G9/055
主分类号
C23C14/02
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代理人
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