System and method for use in determining the thickness of a layer of interest in a multi-layer structure

摘要

A system (100) for use in determining a thickness of a layer of interest in a multi-layer structure is provided. The system including a sample engaging member (108) including a first electrode (122) having a first sample contact surface (126) configured to be positioned in contact with a first surface of the multi-layer structure, a second electrode (124) having a second sample contact surface (128) configured to be positioned in contact with a second surface of the multi-layer structure, wherein the second surface is opposite the first surface, a pressure control device (144) configured to press the first electrode against the multi-layer structure substantially at a predetermined sampling pressure, wherein the sampling pressure is a pressure at which an electrical impedance of the sample tracks a reference impedance associated with the sample (165), and a measurement device (160) electrically coupled to the first electrode and the second electrode, the measurement device configured to measure an electrical impedance between the first electrode and the second electrode.