发明名称 Planar silicide semiconductor structure
摘要 A planar silicide structure and method of fabrication is disclosed. A FET having a silicided raised source-drain structure is formed where the height of the source-drain structures are the same as the height of the gates, simplifying the process of forming contacts on the FET. One embodiment utilizes a replacement metal gate FET and another embodiment utilizes a gate-first FET.
申请公布号 US8236637(B2) 申请公布日期 2012.08.07
申请号 US20100893245 申请日期 2010.09.29
申请人 UTOMO HENRY K.;JAIN SAMEER HEMCHAND;RAMACHANDRAN RAVIKUMAR;TRAN CUNG D.;INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 UTOMO HENRY K.;JAIN SAMEER HEMCHAND;RAMACHANDRAN RAVIKUMAR;TRAN CUNG D.
分类号 H01L21/8238 主分类号 H01L21/8238
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