发明名称 WAFER CARRIER
摘要 PURPOSE: A wafer carrier is provided to stably install a wafer by changing a shape of a slot to be identical to a bending direction of the wafer. CONSTITUTION: Slots(108) is integrally projected to an inner circumferential side of a sidewall of a frame(106). The slots are arranged at a predetermined interval. The slots vertically form a curved shape having the same direction with a bending direction of a wafer. A support(112) is integrally formed in a lower portion of the frame. The support supports the frame.
申请公布号 KR20120087658(A) 申请公布日期 2012.08.07
申请号 KR20110008997 申请日期 2011.01.28
申请人 LG INNOTEK CO., LTD. 发明人 YANG, HYUNG WOO;CHOI, HEE SEOK;KIM, BUM CHUL;LEE, JUNG BAE;KIM, IN GON
分类号 H01L21/673;B65D85/38;B65D85/86 主分类号 H01L21/673
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