发明名称 |
Method and system for defect detection |
摘要 |
A system, method and computer program product for defect detection, the method includes: (i) retrieving a second pixel of a second image that corresponds to a tested pixel of a first image of the object; wherein the first and second images were obtained using different acquisition methods; (ii) searching a third pixel of the second image such that a neighborhood of the second pixel is similar to a neighborhood of the third pixel; (iii) retrieving a fourth pixel of the first image that corresponds to the third pixel; and (iv) comparing between the tested pixel and the fourth pixel. |
申请公布号 |
US8238647(B2) |
申请公布日期 |
2012.08.07 |
申请号 |
US201113170037 |
申请日期 |
2011.06.27 |
申请人 |
BEN-YISHAY MICHAEL;GVIRTZER OPHIR;APPLIED MATERIALS ISRAEL, LTD. |
发明人 |
BEN-YISHAY MICHAEL;GVIRTZER OPHIR |
分类号 |
G06K9/56;G06K9/40 |
主分类号 |
G06K9/56 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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