发明名称 |
APPARATUS AND METHOD FOR MANUFACTURING VITREOUS SILICA CRUCIBLE |
摘要 |
<p>PURPOSE: An apparatus for manufacturing a vitreous silica crucible and a manufacturing method thereof are provided to control contamination of the vitreous silica crucible caused by broken piece of parts by preventing part damage and abrasion due to silica fume. CONSTITUTION: A mold(2) includes an inner surface of a cylindrical shape. A mold drive mechanism(4) rotates the mold. A partition member(10) consists of a first partition wall(6) and a second partition wall(8). A plurality of arc electrodes(22) generates arc discharge. An electrode driving mechanism(24) drives an arc electrode.</p> |
申请公布号 |
KR20120087431(A) |
申请公布日期 |
2012.08.07 |
申请号 |
KR20110008614 |
申请日期 |
2011.01.28 |
申请人 |
JAPAN SUPER QUARTZ CORPORATION |
发明人 |
FUJITA TAKESHI |
分类号 |
C30B15/10;C03B20/00;C30B29/06;H01L21/02 |
主分类号 |
C30B15/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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