发明名称 APPARATUS AND METHOD FOR MANUFACTURING VITREOUS SILICA CRUCIBLE
摘要 <p>PURPOSE: An apparatus for manufacturing a vitreous silica crucible and a manufacturing method thereof are provided to control contamination of the vitreous silica crucible caused by broken piece of parts by preventing part damage and abrasion due to silica fume. CONSTITUTION: A mold(2) includes an inner surface of a cylindrical shape. A mold drive mechanism(4) rotates the mold. A partition member(10) consists of a first partition wall(6) and a second partition wall(8). A plurality of arc electrodes(22) generates arc discharge. An electrode driving mechanism(24) drives an arc electrode.</p>
申请公布号 KR20120087431(A) 申请公布日期 2012.08.07
申请号 KR20110008614 申请日期 2011.01.28
申请人 JAPAN SUPER QUARTZ CORPORATION 发明人 FUJITA TAKESHI
分类号 C30B15/10;C03B20/00;C30B29/06;H01L21/02 主分类号 C30B15/10
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