发明名称 |
Capacitive RF-MEMS device with integrated decoupling capacitor |
摘要 |
The present invention provides a capacitive RF-MEMS device comprising a vertically integrated decoupling capacitor (14). The decoupling capacitor (14) therefore does not take extra area. Furthermore, the RF-MEMS according to the invention needs less interconnects, which also saves space and which reduces the series inductance/resistance in the RF path.
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申请公布号 |
US8238074(B2) |
申请公布日期 |
2012.08.07 |
申请号 |
US20060913285 |
申请日期 |
2006.04.21 |
申请人 |
STEENEKEN PETER GERARD;EPCOS AG |
发明人 |
STEENEKEN PETER GERARD |
分类号 |
H01G5/16;H01G7/00;H01G7/06 |
主分类号 |
H01G5/16 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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