发明名称 Pressure sensor with a closed cavity containing an inert filling medium
摘要 A pressure sensor has a substrate with conductor tracks for contact-connecting electrical components. The pressure sensor has a measuring element for converting a mechanical measurement variable into an electrical signal and a signal converter for processing the electrical signals from the measuring element further. Furthermore, the pressure sensor has a first diaphragm which, together with the substrate, forms a first closed cavity which contains an inert filling medium. At least one side of the measuring element of the pressure sensor, which comprises an active surface, has direct contact with the filling medium in the first cavity. The signal converter is arranged on the substrate in the form of an unhoused integrated circuit.
申请公布号 US8234926(B2) 申请公布日期 2012.08.07
申请号 US20100904871 申请日期 2010.10.14
申请人 EPCOS AG 发明人 WOHLGEMUTH CHRISTIAN;THIELE PETER
分类号 G01L13/02;G01L15/00 主分类号 G01L13/02
代理机构 代理人
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