| 摘要 |
<P>PROBLEM TO BE SOLVED: To assure a high processing precision with a simple mechanism, for efficient groove processing. <P>SOLUTION: A groove processing tool 2 for a thin film solar cell is held by a holder 17 and is reciprocated relative to the scheduled scribe line of a substrate together with the holder 17, to form a groove on the substrate. The tool 2 includes a tool body 36, that is held by the holder 17, and a blade tip 37. The blade tip 37 is formed at the tip part of the tool body 36, and includes blades 38a and 38b at the tip on the outward side in movement direction and at the tip on the homeward side. Related to the blade tip 37, a side surface 37a on outward side and a side surface 37b on homeward side, facing each other, are formed to be inclined and symmetrical so that the width in movement direction becomes narrower toward a tip end. <P>COPYRIGHT: (C)2012,JPO&INPIT |
