| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a substrate inspection system for a large substrate in which space may be saved without degrading production efficiency and inspection performance. <P>SOLUTION: A substrate inspection system (31) for inspecting a target substrate (G) to be inspected by a plurality of inspection methods comprises: an automatic inspection device (50) for inspecting the target substrate (G) with an image thereof captured by an imaging part; a platform having portal-shaped legs striding over the automatic inspection device (50); a manual macro inspection device (40) disposed on the platform for directly visually inspecting the target substrate (G); and a substrate conveying robot for carrying the target substrate (G) to and from the automatic inspection device (50) and the manual macro inspection device (40). The manual macro inspection device (40) is independently disposed above the automatic inspection device (50) via the platform. <P>COPYRIGHT: (C)2012,JPO&INPIT |
