OXIDE BASED LED BEOL INTEGRATION

摘要

A light emitting diode (LED) structure (Fig 6g) and method for making a light emitting diode are disclosed. The structure comprises deep trench metal electrodes (385) between which electroluminescent material (320) is disposed on the sidewalls of the electrodes, (385) forming a series of luminescent diode elements stacked horizontally on a substrate. (See Fig 6g). The method for fabricating the light emitting diode structure can be used for a wide variety of electroluminescent materials.