发明名称 PROCESSING POSITION ADJUSTMENT METHOD AND PROCESSING DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To provide a processing position adjustment method which allows for quick matching of hairlines of a processing device having two processing means. <P>SOLUTION: In the processing device comprising a first processing means, a second processing means, and an imaging means disposed contiguously to the first processing means, the imaging means has a first reference line elongating in a first direction in an imaging region, and a second reference line elongating in a second direction orthogonal to the first direction. Consequently, in the processing position adjustment method of adjusting the processing position of the first and second processing means, respectively, a workpiece is rotated by 90 degree after adjusting the processing position of the first processing means based on the first reference line, and then the processing position of the second processing means is adjusted based on the second reference line. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012146831(A) 申请公布日期 2012.08.02
申请号 JP20110004487 申请日期 2011.01.13
申请人 DISCO ABRASIVE SYST LTD 发明人 ANDO KIMITO
分类号 H01L21/301 主分类号 H01L21/301
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