发明名称 |
GATHERING SPECTRA FROM MULTIPLE OPTICAL HEADS |
摘要 |
A polishing apparatus includes a platen to hold a polishing pad having a plurality of optical apertures, a carrier head to hold a substrate against the polishing pad, a motor to generate relative motion between the carrier head and the platen, and an optical monitoring system. The optical monitoring system includes at least one light source, a common detector, and an optical assembly configured to direct light from the at least one light source to each of a plurality of separated positions in the platen, to direct light from each position of the plurality of separated positions to the substrate as the substrate passes over said each position, to receive reflected light from the substrate as the substrate passes over said each position, and to direct the reflected light from each of the plurality of separated positions to the common detector. |
申请公布号 |
WO2012102871(A2) |
申请公布日期 |
2012.08.02 |
申请号 |
WO2012US21135 |
申请日期 |
2012.01.12 |
申请人 |
APPLIED MATERIALS, INC.;DAVID, JEFFREY DRUE;SWEDEK, BOGUSLAW A.;BENVEGNU, DOMINIC J.;DHANDAPANI, SIVAKUMAR |
发明人 |
DAVID, JEFFREY DRUE;SWEDEK, BOGUSLAW A.;BENVEGNU, DOMINIC J.;DHANDAPANI, SIVAKUMAR |
分类号 |
H01L21/304 |
主分类号 |
H01L21/304 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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