<p>Provided is a method for high-speed neutralizing of charge arising in the area of a sample irradiated by a charged particle beam without providing a new, separate device in a charged particle beam apparatus. At the stage following irradiation by the charged particle beam for measuring the sample and before carrying out the next measurement, the retarding voltage and/or acceleration voltage is adjusted and controlled such that neutralization is accomplished by the difference between the value for the retarding voltage and the value for the acceleration voltage being made less than that during measurements. The charge arising in the area of the sample irradiated by the charged particle beam can be neutralized without providing a separate device in the charged particle beam apparatus; therefore, neutralization is possible without lowering throughput.</p>
