| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a gallium nitride molded article having a low resistance and a high density, and to provide a gallium nitride sputtering target which allows direct current sputtering. <P>SOLUTION: A gallium metal-permeated gallium nitride molded article is characterized in that gallium nitride and gallium metal exist as different phases in the molded article, and the molar ratio of Ga/(Ga + N) in the whole molded article is 55-80%. <P>COPYRIGHT: (C)2012,JPO&INPIT |
