| 摘要 |
<P>PROBLEM TO BE SOLVED: To reduce a required time by expanding a machining area of irradiation per working time related to a machining method of general-purpose laborsaving, in machining using a femtosecond laser. <P>SOLUTION: In this femtosecond laser beam machine, a light source beam oscillated from a femtosecond laser oscillator is divided into a main optical axis beam and a plurality of branch beams having optical path lengths different from each other, and an integrated beam obtained by retro-condensing the main optical axis beam and the branch beams is led to a light reception head including a condenser lens. Furthermore, while bringing a rotary base into line with the optical axis of the integrated beam and concentrically rotating a lens holder of the light reception head installed on the rotary base in a state that the lens holder is eccentrically moved to the rotational axis of the rotary base, a slide table is moved on a circular orbit to the optical axis of the integrated beam under simultaneous two-axis control of an X-axis and a Y-axis, and a work that is a machining target is continuously irradiated, so that the irradiation is formed in a spiral shape to arcuately expand an irradiation area. <P>COPYRIGHT: (C)2012,JPO&INPIT |
