| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a light source for exposure which is compact and inexpensive and is capable of reducing the number of LED elements in an LED light source to obtain a sufficient light quantity in a short time. <P>SOLUTION: An exposure device is configured to have exposure light source means for emitting exposure light, table means which is movable in a plane while placing an exposure substrate and control means for controlling the table means and the exposure light source means. The exposure light source means has a light source part in which a plurality of light emitting elements are two-dimensionally arranged. When an exposure substrate placed on the table means by the exposure light source means is exposed with a predetermined total exposure light quantity within a predetermined period of time, the control means is configured such that the light source part is controlled and a plurality of pulsed lights are emitted from the light source part to irradiate the exposure substrate while sequentially changing the irradiation conditions. <P>COPYRIGHT: (C)2012,JPO&INPIT |
