发明名称 |
SILICON MELT CONTACTING MEMBER AND PROCESS FOR PRODUCTION THEREOF, AND PROCESS FOR PRODUCTION OF CRYSTALLINE SILICON |
摘要 |
Provided are: a silicon melt contacting member which has greatly improved liquid repellency for a silicon melt and in which the liquid repellency can be maintained permanently, and which is suitable for the production of crystalline silicon; and a process for producing crystalline silicon, particularly spherical crystalline silicon having high crystallinity, with high efficiency using the silicon melt contacting member. A silicon melt contacting member having a porous sintered material layer on the surface thereof, preferably on a substrate composed of a ceramic material such as aluminum nitride, wherein the porous sintered material layer contains silicon nitride as the main component, has a thickness of 10-500 µm and has, dispersed therein, multiple void pores preferably having an average equivalent circle diameter of 1-25 µm at a void-occupying area ratio of 30-80%, and wherein the void pores are communicated with each other to form communicated holes each having a depth of 5 µm or more. |
申请公布号 |
WO2012102343(A1) |
申请公布日期 |
2012.08.02 |
申请号 |
WO2012JP51669 |
申请日期 |
2012.01.26 |
申请人 |
YAMAGUCHI UNIVERSITY;TOKUYAMA CORPORATION;KOMATSU, RYUICHI;ITOH, HIRONORI;AZUMA, MASANOBU |
发明人 |
KOMATSU, RYUICHI;ITOH, HIRONORI;AZUMA, MASANOBU |
分类号 |
C30B29/06;C01B33/02;C04B38/06;C30B11/00;H01L21/208;H01L31/04 |
主分类号 |
C30B29/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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