SCANNING ELECTRON MICROSCOPE

摘要

The present invention is a scanning electron microscope provided with a function for scanning a sample with a first beam that forms a preliminary charge on a surface of the sample (1909) for highly efficient detection of electrons (1910) released from the bottom of the contact hole or the like and thereafter scanning with a second beam for observing the sample. The scanning electron microscope is characterized by scanning deflectors (1905) being controlled such that the charge density at the edge part (B) of the scanning region is greater than the charge density at the center part (A) of the scanning region when scanning is performed with the first beam. Thus, a scanning electron microscope wherein an electric potential gradient given by a preliminary charge is controlled without changing the lens conditions can be provided.