DEFORMABLE MIRROR HAVING CAPACITIVE SENSORS

摘要

The invention relates to a deformable mirror (1) comprising a deformable reflective member (2) having a reflective surface (3), at least one actuator (6) capable of moving said reflective member (2) substantially in a deformation direction (XX') so as to be capable of deforming the reflective surface (3), as well as at least one position sensor (14) arranged in the interstitial space (12) between the reflective surface (3) and the widest cross-section (S6MAX) of the actuator (6), on an intermediate reference mounting (11), so as to be capable of estimating the position of the reflective surface (3), wherein the sensor (14) occupies, transversely to the deformation direction, a cross-section (S 14) which has, projecting in said deformation direction (XX'), at least one area (SR) that overlaps with the widest cross-section of the actuator (S6MAX). The invention can be used for deformable mirrors which are used in adaptive optics.