发明名称 VIBRATION PIECE, VIBRATOR, OSCILLATOR AND ELECTRONIC APPARATUS
摘要 <P>PROBLEM TO BE SOLVED: To provide a vibration piece which can suppress the vibration leakage from vibration arms which vibrate in a thickness direction to a base part and provide a vibrator, an oscillator, and an electronic apparatus having the vibration piece. <P>SOLUTION: A crystal vibration piece 1 includes a base part 10 and vibration arms 11a, 11b, and 11c extending in a Y-axis direction from the base part 10. The base part 10 includes a connection part 10a and a support part 10b. Groove parts 12a and 12b are provided on principal surfaces 10c and 10d of the connection part 10a along a plane specified by a Y-axis direction and an X-axis direction perpendicular to the Y-axis direction in a planar view. The vibration arms 11a, 11b, and 11c flexurally vibrate in a Z-axis direction perpendicular to the principal surfaces 10c and 10d by excitation electrodes 13a, 13b, 13c, 14a, 14b, and 14c. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012147348(A) 申请公布日期 2012.08.02
申请号 JP20110005563 申请日期 2011.01.14
申请人 SEIKO EPSON CORP 发明人 FURUHATA MAKOTO
分类号 H03H9/19;H01L41/09;H01L41/18;H01L41/187;H01L41/22;H01L41/23;H01L41/311;H01L41/33;H03B5/32;H03H9/17;H03H9/215 主分类号 H03H9/19
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