发明名称 METHOD OF IMPRINTING TEXTURE ON RIGID SUBSTRATE USING FLEXIBLE STAMP
摘要 <P>PROBLEM TO BE SOLVED: To provide a method of imprinting a texture on a rigid substrate, having an area greater than 50 square centimeters, preferably greater than 200 square centimeters. <P>SOLUTION: A layer of a curable material is wet-coated on a rigid substrate. Thereafter, a flexible stamp is pressurized over the layer of the curable material to imprint the texture. The flexible stamp comprises a bottom zone having a texture profile corresponding to the texture. The bottom zone has Young's Modulus between 0.5 MPa and 3000 MPa, enabling tolerance for microscopic defects while imprinting of the texture. The flexible stamp also comprises a top zone having Young's Modulus between 0.1 GPa and 10 GPa. The top zone enables tolerance for macroscopic defects. Then, the layer of the curable material is cured. Lastly, the flexible stamp is removed. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012146660(A) 申请公布日期 2012.08.02
申请号 JP20120002707 申请日期 2012.01.11
申请人 MOSER BAER INDIA LTD 发明人 BRAM TITULAER
分类号 H05B33/10;H01L31/04;H01L51/50;H05B33/02 主分类号 H05B33/10
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