| 摘要 |
<P>PROBLEM TO BE SOLVED: To enhance productivity of processing without compromising the processing quality, in a dicing device where dicing is performed while moving holding means and processing means, by controlling the relative speed of the holding means and the processing means appropriately. <P>SOLUTION: A relative speed of holding means for holding a work and processing means is set to a lowest speed when starting the processing, and accelerated to approach a highest speed during the processing. Alternatively, the highest speed is maintained as long as possible when the highest speed is reached, and decelerated to the lowest speed upon finishing the processing. During the processing, the relative speed is maintained equal to or higher than the lowest speed and brought close to the highest speed. When the highest speed is reached, it is maintained as long as possible thus performing the processing efficiently without compromising the processing quality. Furthermore, since the relative speed is set to the lowest speed when starting the processing and upon finishing the processing, the entrance length and the overrun distance can be shortened when compared with prior art, and overall productivity can be enhanced. <P>COPYRIGHT: (C)2012,JPO&INPIT |
