GLASS-EMBEDDED SILICON SUBSTRATE AND METHOD FOR MANUFACTURING SAME

摘要

A method for manufacturing a glass-embedded silicon substrate, the method comprising: a step for forming a recess (11) in a silicon substrate (10); a step for filling the recess (11) with a glass material (20a) in the form of a powder, a paste, or a precursor solution; a step for heating and softening the glass material (20a); a step for sintering the softened glass material (20a); and a step for exposing the glass material (20a) and the silicon substrate (10) on the front and back surfaces of the silicon substrate (10) where the recess (11) is filled with the glass material (20a).