| 摘要 |
<P>PROBLEM TO BE SOLVED: To appropriately spread out resin regardless of work thickness variation and an increase or decrease in the amount of the resin. <P>SOLUTION: In a resin coating apparatus 1 where a liquid resin L supplied to the upper surface of a stage 602 is pressed from above by a work W held on a pressing surface 634 in a pressing part 604 to spread the liquid resin L over the under surface of the work W, the pressing part 604 is provided with a pressure sensor 633 that detects a pressure received by the pressing surface 634 when the liquid resin L is spread over the under surface of the work W by making the work W approach the stage 602 by a moving part 606, and a control part controls the movement of the moving part 606 based on the pressure detected by the pressure sensor 633. <P>COPYRIGHT: (C)2012,JPO&INPIT |
