发明名称 |
TEM SAMPLE PREPARATION |
摘要 |
An improved method of preparing ultra-thin TEM samples that combines backside thinning with an additional cleaning step to remove surface defects on the FIB-facing substrate surface. This additional step results in the creation of a cleaned, uniform hardmask that controls the ultimate results of the sample thinning, and allows for reliable and robust preparation of samples having thicknesses down to the 10nm range. |
申请公布号 |
WO2012103534(A1) |
申请公布日期 |
2012.08.02 |
申请号 |
WO2012US23053 |
申请日期 |
2012.01.28 |
申请人 |
FEI COMPANY;BLACKWOOD, JEFF;BRAY, MATTHEW |
发明人 |
BLACKWOOD, JEFF;BRAY, MATTHEW |
分类号 |
G01N1/28;H01J37/20;H01J37/26 |
主分类号 |
G01N1/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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