发明名称 Shape measuring apparatus
摘要 [PROBLEMS] To provide a shape measuring apparatus having a configuration which enables the operation for aligning a measuring probe and a candidate object to be simplified when the shape of the candidate object is measured. [MEANS TO SOLVE THE PROBLEMS] A shape measuring apparatus is configured so that an optical probe 20 moves relative to a candidate object, and the three-dimensional shape of the candidate object is measured without contact from information obtained by the optical probe 20. The shape measuring apparatus includes a gantry structure 10 allowing the optical probe 20 to be moved to a predetermined position relative to the candidate object, and a support device 30 allowing the candidate object to be rotated around at least two rotational axes.
申请公布号 US2012194651(A1) 申请公布日期 2012.08.02
申请号 US201113200652 申请日期 2011.09.28
申请人 KANTO KENTA;YAMASHITA SEIHO;ENDO TAKESHI;NIKON CORPORATION 发明人 KANTO KENTA;YAMASHITA SEIHO;ENDO TAKESHI
分类号 H04N13/02 主分类号 H04N13/02
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