发明名称 |
Shape measuring apparatus |
摘要 |
[PROBLEMS] To provide a shape measuring apparatus having a configuration which enables the operation for aligning a measuring probe and a candidate object to be simplified when the shape of the candidate object is measured. [MEANS TO SOLVE THE PROBLEMS] A shape measuring apparatus is configured so that an optical probe 20 moves relative to a candidate object, and the three-dimensional shape of the candidate object is measured without contact from information obtained by the optical probe 20. The shape measuring apparatus includes a gantry structure 10 allowing the optical probe 20 to be moved to a predetermined position relative to the candidate object, and a support device 30 allowing the candidate object to be rotated around at least two rotational axes. |
申请公布号 |
US2012194651(A1) |
申请公布日期 |
2012.08.02 |
申请号 |
US201113200652 |
申请日期 |
2011.09.28 |
申请人 |
KANTO KENTA;YAMASHITA SEIHO;ENDO TAKESHI;NIKON CORPORATION |
发明人 |
KANTO KENTA;YAMASHITA SEIHO;ENDO TAKESHI |
分类号 |
H04N13/02 |
主分类号 |
H04N13/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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