ULTRASONIC TRANSDUCER, ULTRASONIC PROBE, AND METHOD FOR PRODUCING ULTRASONIC TRANSDUCER

摘要

The objective of the present invention is to provide an ultrasonic transducer and ultrasonic probe that are able to secure an electrical conductive path while avoiding the complication of a step for producing a non-conductive acoustic matching layer. The present invention is provided with a plurality of piezoelectric bodies disposed two-dimensionally. Each of the piezoelectric bodies is provided with an electrode. The present invention is further provided with a non-conductive acoustic matching layer having a first surface on the electrode side and a second surface at the reverse side from the first surface, and is also provided with a conductive acoustic matching layer disposed at the second surface side of the non-conductive acoustic matching layer. Also, the present invention is provided with a substrate disposed on the side of the conductive acoustic matching layer that is on the reverse side from the non-conductive acoustic matching layer. A plurality of grooves that penetrate the non-conductive acoustic matching layer and that extend partway through the piezoelectric bodies on the first surface side or partway through the conductive acoustic matching layer on the second surface side are formed between the first surface and the second surface of the non-conductive acoustic matching layer. Also, the electrodes and the substrate electrically inter-conduct via the grooves.