| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an ultraviolet sensor element excellent in ultraviolet detection capability even when manufactured using an inexpensive material and a simple facility. <P>SOLUTION: In the ultraviolet sensor element, a non-porous oxide layer comprising titanium oxide or zinc oxide, a porous oxide layer comprising the same material as the non-porous oxide layer, and a metal layer are laminated, and the metal layer forms a Schottky junction relative to the porous oxide layer. The film thickness of the non-porous oxide layer is 20-700 nm, and the film thickness of the porous oxide layer is 2-20 μm. <P>COPYRIGHT: (C)2012,JPO&INPIT |
