| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an optical device having such an excellent optical performance that, when performing a plurality of wavelength converting processes in combination with each other or when performing a wavelength converting process and a light modulating process in combination with each other, these combined processes can be performed stably with high efficiency, a laser device which stably generates laser light of a desired wavelength using the optical device, and an exposure apparatus which performs exposure by irradiating an exposed surface with light of the desired wavelength while using the optical device. <P>SOLUTION: In a ferroelectric substrate 31, a spatial light modulation unit 35 is provided between a wavelength conversion unit 315 and an emission plane 311b and modulates laser light outputted from the wavelength conversion unit 315, and only 0th-order light of a specific wavelength is guided to the substrate to draw a pattern corresponding to LSI data. Furthermore, within the single ferroelectric substrate 31, the spatial light modulation unit 35 is provided together with wavelength conversion units 314 and 315. <P>COPYRIGHT: (C)2012,JPO&INPIT |
