| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a working method which can prevent minute work distortion which is called as a pit from being broken out on a work face, does not decide a cross-sectional shape of an edge of the workpiece by a grindstone shape, avoids the accuracy of a cross-sectional shape from being influenced by of the accuracy of a grindstone, has no need to exchange the grindstone for each kind of the workpiece difference in cross-sectional shape, further can make the grindstone freely enter the underside of the workpiece also to hold a grindstone width wide, can reduce a work time, and can prolong the lifetime of the grindstone, and a working device for a workpiece. <P>SOLUTION: As the largest characteristic, the edge of the workpiece is ground by an axis orthogonal end of the cup type grindstone, and various cross-sectional shapes of edges of the workpiece can be formed of the grindstone faces with no groove when an orientation flat, a notch and the like of the workpiece of a semiconductor wafer etc. are worked. <P>COPYRIGHT: (C)2012,JPO&INPIT |
