ELASTIC WAVE ELEMENT AND ELASTIC WAVE APPARATUS USING SAME

摘要

A SAW element (1) comprises a substrate (3), electrode fingers (13b) arranged on an upper face (3a) of the substrate (3), and mass-adding films (9) arranged on the upper faces of the electrode fingers (13b). When viewing cross sections of the mass adding films (9) in a direction interesting at right angles with the direction in which the electrode fingers (13b) extend, the width of the cross sections is made to become the narrowest at the upper side thereof. By arranging mass adding films (9) formed to be such a shape on the upper faces of the electrode fingers (13b), the electromechanical coupling factor of the SAW element (1) can be increased.