| 摘要 |
<p>Provided is a transport robot capable of smoothly moving semiconductor wafers between chambers that face each other. A wafer transport robot (100) is provided with an arm (10) comprising two links (12 and 13). The tip of the arm (10) is equipped with a wafer holder (6). The drive link (13), which corresponds to the base of the arm (10), is rotatably coupled to a housing (2). The arm (10) is configured such that the movement of the arm tip in conjunction with the rotation of the drive link (13) is limited to a linear or curved trajectory. In addition, the start point (Ws) and end point (We) of the trajectory are the same distance from the rotational center of the drive link (13), and the orientation of the arm tip at the start point and the orientation of the arm tip at the end point are mirror images of each other across a straight line that passes through the mid-point between the start point and the end point and the aforementioned rotational center.</p> |
