发明名称 FINFET STRUCTURE HAVING FULLY SILICIDED FINS
摘要 <p>A semiconductor device which includes fins of a semiconductor material formed on a semiconductor substrate and then a gate electrode formed over and in contact with the fins. An insulator layer is deposited over the gate electrode and the fins. A trench opening is then etched in the insulator layer. The trench opening exposes the fins and extends between the fins. The fins are then silicided through the trench opening. Then, the trench opening is filled with a metal in contact with the silicided fins to form a local interconnect connecting the fins.</p>
申请公布号 WO2012103033(A1) 申请公布日期 2012.08.02
申请号 WO2012US22264 申请日期 2012.01.23
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 BRYANT, ANDRES;BU, HUIMING;GUO, DECHAO;HAENSCH, WILFRIED, E.;YEH, CHUN-CHEN
分类号 H01L29/78;H01L21/336 主分类号 H01L29/78
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