PROBE STRUCTURE AND METHOD FOR MANUFACTURING THE SAME

摘要

PURPOSE: A probe needle structure and a manufacturing method thereof are provided to improve efficiency of measuring operation and to prevent contraction and deformation of a base layer through a guide pattern. CONSTITUTION: Probe needle patterns(110) are formed on a base layer(100). Bumps(120) are formed on the end portion of the probe needle patterns. The base layer is sandwiched between alignment patterns(140) and the probe needle patterns. The alignment patterns are arranged on the location corresponding to the location of the probe needle patterns. A guide pattern is electrically separated with the probe needle patterns. A guide structure comprises the guide pattern and is formed around the probe needle patterns. The guide pattern comprises a first portion extended in a first direction and a second portion extended in a second direction.