| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide spindle structure capable of preventing deterioration in test accuracy. <P>SOLUTION: If a shaft center of an upper spindle 47 is misaligned or inclined with respect to a shaft center of a lower spindle 27 at the time a recess 47p of the upper spindle 47 is engaged with a protrusion 28p of a plunger 28 positioned at an end of the lower spindle 27, a laminated rubber bearing 41 displaces an upper end of an upper housing 46 and also an upper end of the upper spindle 47 so as to eliminate the misalignment and the inclination between the shaft centers. <P>COPYRIGHT: (C)2012,JPO&INPIT |
