| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a lens module capable of performing both of differential interference observation and normal observation, capable of suppressing a flare when performing the normal observation, and capable of reliably detecting a minute defect when performing the differential interference observation, to provide a magnifying observation apparatus using the lens module, and to provide a magnifying observation method. <P>SOLUTION: A polarizer 21 for polarizing light from a light source 3 and an analyzer 9 for polarizing a part of the reflected light passing through a light transmissive member are arranged such that their polarization axis directions are substantially parallel to each other. A birefringent optical member 15 is arranged such that each of two polarization axis directions orthogonal to each other makes about 45 degrees with respect to the polarization axis direction of the polarizer. A polarization conversion member 7 has a high-speed axis or a low-speed axis and is arranged such that any of the axes makes about 45 degrees with respect to the polarization axis direction of the polarizer. <P>COPYRIGHT: (C)2012,JPO&INPIT |
