发明名称 Compression Clamping of Semiconductor Components
摘要 The present invention relates to a method of clamping a semiconductor assembly with a desired compression force equally distributed across the opposing surfaces of the devices and associated components of the semiconductor assembly.
申请公布号 US2012192392(A1) 申请公布日期 2012.08.02
申请号 US201213416429 申请日期 2012.03.09
申请人 FISHMAN OLEG S.;PRABHU SATYEN N.;INDUCTOTHERM CORP. 发明人 FISHMAN OLEG S.;PRABHU SATYEN N.
分类号 H01L21/50 主分类号 H01L21/50
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