| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an inexpensive force sensor which is a capacitance force sensor with simple structure, copes with small force to large force, whose detection accuracy is satisfactory, and whose stability of detection is satisfactory to temperature variation. <P>SOLUTION: A capacitance force sensor includes: a fixing part 10 which is fixed by being attached to an external device or a base; a load attachment part 16 on which an object to which force from the outside acts is attached; a load transmission part 14 which transmits force; an elastic part 12 formed between the fixing part 10 and the load transmission part 14; a fixing board 20 attached to the fixing part; a displacement electrode 18 formed on the opposite side to the fixing board of the load transmission part 14; and a fixing electrode 22 formed on the opposite surface to the load transmission part of the fixing board, and is constituted so that three or more capacitative elements consisting of the displacement electrode and the fixing electrode, the fixing part, the load transmission part, the elastic part, and the fixing board are constituted of materials with approximately equal expansion coefficients, and at least one of force components and moment components in directions of one axis or a plurality of axes is detected. <P>COPYRIGHT: (C)2012,JPO&INPIT |
