| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a manufacturing method for a grinding liquid composition which reduces scratches and particles of a grinding object material after grinding. <P>SOLUTION: The manufacturing method for the grinding liquid composition has a step of filtering a treated grinding liquid composition containing colloidal silica with an average diameter of primary particles of 1 to 100 nm through a filter containing a filter aid. The filter aid has a BET specific surface area of 4.0 m<SP POS="POST">2</SP>/g or larger, and a volume of integrated pores of 0.15 μm or smaller of the filter aid which is determined by nitrogen absorption is 0.3 mL/g or larger. <P>COPYRIGHT: (C)2012,JPO&INPIT |
